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SUPER FLAT LINING & ANTI-STATIC
Fine equipment plant, semiconductor, computer room, hospitals(surgery room, X-ray room), automated plant, clean room system
| Measuring condition | Surface resistance | surface resistance value |
|---|---|---|
| Temperature 20 ±1°C | Resistance when static electricity flows on the piece surface |
10⁵ ~ 10⁸Ω |
| Humidity 20 ±1°C |
| Work environment | Leak resistance | Others |
|---|---|---|
| Environment exposed to explosion and fire risk |
10⁸Ω | Operation room,processes handling flammable gas and solvent |
| Environment exposed to electric shock risk |
10⁸Ω | Packaging plant, cutting plant |
| Environment exposed to production interruption risk |
10⁸Ω | Calculation room, semiconductor room, |
| Clean room class (note 2) |
||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| US federal specification 209B | NASA NG8-5340-2 | target value | ||||||||||
| Particle | Particle | Microorganism | RCS-Air Sampla contact of microorganisms(four minutes) (note 1) |
adjusting surface resistance value(l) |
||||||||
| Particle size(µ) | Cumulative number of particles |
Particle size(µ) | Cumulative number of particles |
Floating amount | number of floats | |||||||
| ft² | /l | ft² | /l | ft² | /l | ft²/주 | /l/주 | |||||
| 100 | ≥0.5 | ≤100 | ≤3.5 | ≥0.5 | ≤100 | ≤3.5 | ≥0.1 | ≥0.0035 | ≥1.200 | ≥12,900 | 0~1 | 5 x 10 8-5 |
| ≥5 | 0 | 0 | ≥5 | 0 | 0 | |||||||
| 10,000 | ≥0.5 | ≤10.000 | ≤350 | ≥0.5 | ≤10.000 | ≤350 | ≥0.5 | ≥0.0176 | ≥6.000 | ≥64,600 | <3 | 5 x 10 13-11 |
| ≥5 | ≤65 | ≤2.3 | ≥5 | ≤65 | ≤2.3 | |||||||
| 100,000 | ≥0.5 | ≤10.000 | ≤3,500 | ≥0.5 | ≤10.000 | ≤3,500 | ≥2.5 | ≥0.0884 | ≥30.000 | ≥323,000 | <14 | 5 x 10 13-12 |
| ≥5 | ≤700 | ≤25 | ≥5 | ≤700 | ≥25 | |||||||
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